Elucidation of microstructure of single-phase microcrystalline silicon based on crystallite size distributions

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dc.creatorRam, Sanjay K.
dc.creatorIslam, MD. N.
dc.creatorCabarrocas, P. Roca I
dc.creatorKumar, Satyendra
dc.date2007-07-02
dc.date.accessioned2026-07-07T08:13:32Z
dc.date.available2026-07-07T08:13:32Z
dc.descriptionHighly crystallized undoped hydrogenated microcrystalline silicon films prepared using SiF4-H2 mixture plasma were investigated at various stages of growth employing different microstructural probes. Our self-consistent results elucidate various aspects of the evolution of film microstructure, compositional changes and variations in crystallite size distributions with film growth. Inclusion of a bimodal crystallite size distribution in microstructural data analysis leads to results that are corroborative with those obtained from other microstructural tools, and yields a more physically accurate and coherent description of microcrystalline silicon film microstructure.
dc.description5 pages, 4 figures
dc.identifierhttps://arxiv.org/abs/0707.0225
dc.identifierhttp://arxiv.org/abs/0707.0225
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/132800
dc.subjectMaterials Science
dc.titleElucidation of microstructure of single-phase microcrystalline silicon based on crystallite size distributions
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