Single Chip Sensing of Multiple Gas Flows

Simple item page
dc.creatorBruschi, P.
dc.creatorDei, M.
dc.creatorPiotto, M.
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:41Z
dc.date.available2026-07-07T12:18:41Z
dc.descriptionThe fabrication and experimental characterization of a thermal flow meter, capable of detecting and measuring two independent gas flows with a single chip, is described. The device is based on a 4 x 4 mm2 silicon chip, where a series of differential micro-anemometers have been integrated together with standard electronic components by means of postprocessing techniques. The innovative aspect of the sensor is the use of a plastic adapter, thermally bonded to the chip, to convey the gas flow only to the areas where the sensors are located. The use of this inexpensive packaging procedure to include different sensing structures in distinct flow channels is demonstrated.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0892
dc.identifierhttp://arxiv.org/abs/0805.0892
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212494
dc.subjectOther Computer Science
dc.titleSingle Chip Sensing of Multiple Gas Flows
dc.typetext

Files

Collections

arXiv