Ten-nanometer surface intrusions in room temperature silicon

dc.creatorLin, Shu-Han
dc.creatorMack, Iris
dc.creatorPongkrapan, Noom
dc.creatorFraundorf, P.
dc.date2001-10-19
dc.date.accessioned2026-07-07T02:43:12Z
dc.date.available2026-07-07T02:43:12Z
dc.descriptionDefects ~10 nm in size, with number densities ~10^{10} cm^{-2}, form spontaneously beneath ion-milled, etched, or HF-dipped silicon surfaces examined in our Ti-ion getter-pumped transmission electron microscope (TEM) after exposure to air. They appear as weakly-strained non-crystalline intrusions into silicon bulk, that show up best in the TEM under conditions of strong edge or bend contrast. If ambient air exposure is <10 minutes, defect nucleation and growth can be monitored {\em in situ}. Possible mechanisms of formation are discussed.
dc.description4 pages, 5 figures, RevTeX4
dc.identifierhttps://arxiv.org/abs/cond-mat/0110393
dc.identifierhttp://arxiv.org/abs/cond-mat/0110393
dc.identifierElectrochemical and Solid-State Letters, 5 (9) G83-G85 (2002)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/18407
dc.subjectMaterials Science
dc.subjectChemical Physics
dc.titleTen-nanometer surface intrusions in room temperature silicon
dc.typetext

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