Reduced-Order Modelling of the Bending of an Array of Torsional Micromirrors

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dc.creatorMolfese, A.
dc.creatorNannini, A.
dc.creatorPieri, F.
dc.date2007-11-21
dc.date.accessioned2026-07-07T08:45:43Z
dc.date.available2026-07-07T08:45:43Z
dc.descriptionReduced-Order Modelling of the Bending of an Array of An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupled-field FEM simulation.
dc.descriptionSubmitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
dc.identifierhttps://arxiv.org/abs/0711.3330
dc.identifierhttp://arxiv.org/abs/0711.3330
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/143047
dc.subjectOther Computer Science
dc.titleReduced-Order Modelling of the Bending of an Array of Torsional Micromirrors
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