Comparison of Two Low-Power Electronic Interfaces for Capacitive Mems Sensors

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dc.creatorNagy, G.
dc.creatorSzucs, Z.
dc.creatorHodossy, S.
dc.creatorRencz, M.
dc.creatorPoppe, A.
dc.date2008-02-21
dc.date.accessioned2026-07-07T09:22:19Z
dc.date.available2026-07-07T09:22:19Z
dc.descriptionThe paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first solution was designed to interface a capacitive humidity sensor designed and built for a humidity-dependent monolithic capacitor developed at Budapest University of Technology and Economics. The second case presents the possible read-out solutions for a SOI-MEMS accelerometer. Both of the architectures were built and tested in a discrete implementation to qualify the methods before the integrated realization. The paper presents a detailed comparison of the two methods
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
dc.identifierhttps://arxiv.org/abs/0802.3049
dc.identifierhttp://arxiv.org/abs/0802.3049
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/155337
dc.subjectOther Computer Science
dc.titleComparison of Two Low-Power Electronic Interfaces for Capacitive Mems Sensors
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