Consideration of arrayed $e$-beam microcolumn based systems potentialities for wafer defects inspection

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dc.creatorKazmiruk, V. V.
dc.creatorSavitskaja, T. N.
dc.date2008-05-02
dc.date.accessioned2026-07-07T09:36:40Z
dc.date.available2026-07-07T09:36:40Z
dc.descriptionThe $e$-beam column which is intended on defects inspection is considered. The defects which are to be examined or potentially might be examined at inspection stage are briefly considered. Interrelations between the system parameters is ascertaining and the ways of optimization and the technical requirements to the system in whole are discussed. As a result, we find the optimal combinations of the system parameters for the purpose.
dc.description17 pages, 18 figures
dc.identifierhttps://arxiv.org/abs/0805.0248
dc.identifierhttp://arxiv.org/abs/0805.0248
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/160198
dc.subjectInstrumentation and Detectors
dc.titleConsideration of arrayed $e$-beam microcolumn based systems potentialities for wafer defects inspection
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