Sub-$μ$ structured Lotus Surfaces Manufacturing

Simple item page
dc.creatorWorgull, M.
dc.creatorHeckele, M.
dc.creatorMappes, T.
dc.creatorMatthis, B.
dc.creatorTosello, G.
dc.creatorMetz, T.
dc.creatorGavillet, J.
dc.creatorKoltay, P.
dc.creatorHansen, H. N.
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:35Z
dc.date.available2026-07-07T12:18:35Z
dc.descriptionSub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 micrometers high.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0854
dc.identifierhttp://arxiv.org/abs/0805.0854
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212461
dc.subjectOther Computer Science
dc.titleSub-$μ$ structured Lotus Surfaces Manufacturing
dc.typetext

Files

Collections

arXiv