Development and Application of a Diaphragm Micro-Pump with Piezoelectric Device

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dc.creatorMa, H. K.
dc.creatorHou, B. R.
dc.creatorWu, H. Y.
dc.creatorLin, C. Y.
dc.creatorGao, J. J.
dc.creatorKou, M. C.
dc.date2008-02-21
dc.date.accessioned2026-07-07T09:22:23Z
dc.date.available2026-07-07T09:22:23Z
dc.descriptionIn this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 5mm x 8mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system is designed and implemented. The performance of one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
dc.identifierhttps://arxiv.org/abs/0802.3070
dc.identifierhttp://arxiv.org/abs/0802.3070
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/155358
dc.subjectOther Computer Science
dc.titleDevelopment and Application of a Diaphragm Micro-Pump with Piezoelectric Device
dc.typetext

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