A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction Detection

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dc.creatorWang, Y. -H.
dc.creatorHsueh, Tzu-Han
dc.creatorMa, Rong-Hua
dc.creatorLee, Chia-Yen
dc.creatorFu, Lung-Ming
dc.creatorChou, P. -Ch.
dc.creatorTsai, Chien-Hsiung
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:44Z
dc.date.available2026-07-07T12:18:44Z
dc.descriptionThe purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers, reassembled the gas flow sensor with four cantilever beams that perpendicular to each other and manufactured piezoresistive structure on each micro-cantilever by MEMS technologies, respectively. When the cantilever beams are formed after etching the silicon wafer, it bends up a little due to the released residual stress induced in the previous fabrication process. As air flows through the sensor upstream and downstream beam deformation was made, thus the airflow direction can be determined through comparing the resistance variation between different cantilever beams. The flow rate can also be measured by calculating the total resistance variations on the four cantilevers.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0913
dc.identifierhttp://arxiv.org/abs/0805.0913
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212511
dc.subjectOther Computer Science
dc.titleA Microcantilever-based Gas Flow Sensor for Flow Rate and Direction Detection
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