Noise Analysis and Noise-based Optimization for Resonant MEMS Structures

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dc.creatorSharma, Mrigank
dc.creatorKannan, Akila
dc.creatorCretu, Edmond
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:46Z
dc.date.available2026-07-07T12:18:46Z
dc.descriptionThis paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The existing literature presents detailed models for the damping at microscale, but usually neglects them in the noise analysis process, assuming instead a white spectrum approximation for the mechano-thermal noise. The present work extends the implications of the complex gas-solid interaction into the field of noise analysis for mechanical sensors, and provides a semi-automatic procedure for behavioral macromodel extraction and sensor optimization with respect to signal-to-noise ratio.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0927
dc.identifierhttp://arxiv.org/abs/0805.0927
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212522
dc.subjectOther Computer Science
dc.titleNoise Analysis and Noise-based Optimization for Resonant MEMS Structures
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