A Mems Tribometer for on-Chip Measurements of Dynamic Friction Loops

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dc.creatorVan Spengen, Merlijn W. M.
dc.creatorTurq, Viviane
dc.creatorWijts, Geert G. H. C. J.
dc.creatorFrenken, Joost J. W. M.
dc.date2008-05-02
dc.date.accessioned2026-07-07T12:18:34Z
dc.date.available2026-07-07T12:18:34Z
dc.descriptionA MEMS based tribometer has been developed that can be read out with nanometer and nano-Newton resolution, approaching the resolution and sensitivity of a friction force microscope (FFM). It can be used to study friction of MEMS device sidewall surfaces. We find repeatable but irregular stick-slip behavior related to the surface roughness or surface modification (wear), depending on the normal force between the sliding surfaces. In addition, we show that normal force modulation can decrease the apparent friction even though the average normal force remains the same. This may be a technologically viable way to reduce friction and wear in microscopic contacts.
dc.descriptionSite de la conférence / Conference web site: http://dei-s1.dei.uminho.pt/mme07/
dc.identifierhttps://arxiv.org/abs/0805.0240
dc.identifierhttp://arxiv.org/abs/0805.0240
dc.identifierDans Micromachining, Micromechanics and Microsystems 2007 - Micromechancis Europe 2007, 18th Workshop on Micromachining, Micromechanics and Microsystems Europe (MME 2007), Guimaraes : Portugal (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212452
dc.subjectMaterials Science
dc.subjectClassical Physics
dc.titleA Mems Tribometer for on-Chip Measurements of Dynamic Friction Loops
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