Microfabrication of Three-Dimensional Structures in Polymer and Glass by Femtosecond Pulses
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We report three-dimensional laser microfabrication, which enables microstructuring of materials on the scale of 0.2-1 micrometers. The two different types of microfabrication demonstrated and discussed in this work are based on holographic recording, and light-induced damage in transparent dielectric materials. Both techniques use nonlinear optical excitation of materials by ultrashort laser pulses (duration < 1 ps).
This is a proceedings paper of bi-lateral Conf. (Republics of China & Lithuania) on Optoelectronics and Magnetic Materials, Taipei, May 25-26, 2002.}
This is a proceedings paper of bi-lateral Conf. (Republics of China & Lithuania) on Optoelectronics and Magnetic Materials, Taipei, May 25-26, 2002.}