Characterization and Modeling of an Electro-thermal MEMS Structure
| dc.creator | Szabo, P. G. | |
| dc.creator | Szekely, Vladimir | |
| dc.date | 2008-05-07 | |
| dc.date.accessioned | 2026-07-07T12:18:37Z | |
| dc.date.available | 2026-07-07T12:18:37Z | |
| dc.description | Thermal functional circuits are an interesting and perspectivic group of the MEMS elements. A practical realization is called Quadratic Transfer Characteristic (QTC) element which driving principle is the Seebeck-effect. In this paper we present the analyses of a QTC element from different perspectives. To check the real behavior of the device, we measured a few, secondary properties of the structure which correspond to special behavior because these properties can not be easily derived from the main characteristics. | |
| dc.description | Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838) | |
| dc.identifier | https://arxiv.org/abs/0805.0863 | |
| dc.identifier | http://arxiv.org/abs/0805.0863 | |
| dc.identifier | Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008) | |
| dc.identifier.uri | http://salesiana.dossiersoluciones.com/handle/123456789/212470 | |
| dc.subject | Other Computer Science | |
| dc.title | Characterization and Modeling of an Electro-thermal MEMS Structure | |
| dc.type | text |