Comparison Between Damping Coefficients of Measured Perforated Micromechanical Test Structures and Compact Models

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dc.creatorVeijola, T.
dc.creatorDe Pasquale, Giorgio
dc.creatorSomà, Aurelio
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:41Z
dc.date.available2026-07-07T12:18:41Z
dc.descriptionMeasured damping coefficients of six different perforated micromechanical test structures are compared with damping coefficients given by published compact models. The motion of the perforated plates is almost translational, the surface shape is rectangular, and the perforation is uniform validating the assumptions made for compact models. In the structures, the perforation ratio varies from 24% - 59%. The study of the structure shows that the compressibility and inertia do not contribute to the damping at the frequencies used (130kHz - 220kHz). The damping coefficients given by all four compact models underestimate the measured damping coefficient by approximately 20%. The reasons for this underestimation are discussed by studying the various flow components in the models.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0893
dc.identifierhttp://arxiv.org/abs/0805.0893
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212495
dc.subjectOther Computer Science
dc.titleComparison Between Damping Coefficients of Measured Perforated Micromechanical Test Structures and Compact Models
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