Overlay Alignment Using Two Photonic Crystals

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dc.creatorPeng, Can
dc.creatorMorton, Keith
dc.creatorYu, Zhaoning
dc.creatorChou, Stephen Y.
dc.date2005-12-08
dc.date.accessioned2026-07-07T06:56:10Z
dc.date.available2026-07-07T06:56:10Z
dc.descriptionIn this paper we proposed a novel overlay alignment method using two sets of identical photonic crystals (PhCs). In this method the reflection or transmission spectrum of the two overlaid photonic crystals is measured to help wafer tilt, yaw rotation, and translation aligning. The initial testing results with two 1D photonic crystals and analysis of the alignment accuracy are presented. This method is particularly useful in building photonic crystal stacks with nanoimprint lithography (NIL).
dc.description13pages 6 figures
dc.identifierhttps://arxiv.org/abs/physics/0512073
dc.identifierhttp://arxiv.org/abs/physics/0512073
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/106536
dc.subjectOptics
dc.titleOverlay Alignment Using Two Photonic Crystals
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