New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films

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dc.creatorFabrègue, D.
dc.creatorAndré, Nicolas
dc.creatorPardoen, T.
dc.creatorRaskin, J. P.
dc.date2007-11-21
dc.date.accessioned2026-07-07T08:45:43Z
dc.date.available2026-07-07T08:45:43Z
dc.descriptionA new concept of micromachines has been developed for measuring the mechanical properties of thin metallic films. The actuator is a beam undergoing large internal stresses built up during the deposition process. Al thin films are deposited partly on the actuator beam and on the substrate. By etching the structure, the actuator contracts and pulls the Al film. Full stress strain curves can be generated by designing a set of micromachines with various actuator lengths. In the present study, the displacements have been measured by scanning electronic microscopy. The stress is derived from simple continuum mechanics relationships. The tensile properties of Al films of various thicknesses have been tested. A marked increase of the strength with decreasing film thickness is observed.
dc.descriptionSubmitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
dc.identifierhttps://arxiv.org/abs/0711.3332
dc.identifierhttp://arxiv.org/abs/0711.3332
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/143049
dc.subjectOther Computer Science
dc.titleNew Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films
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