Out-of-Plane Cmos Compatible Magnetometers
| dc.creator | Ghorba, M. El | |
| dc.creator | André, N. | |
| dc.creator | Sobieski, S. | |
| dc.creator | Raskin, J. -P. | |
| dc.date | 2008-02-21 | |
| dc.date.accessioned | 2026-07-07T09:22:25Z | |
| dc.date.available | 2026-07-07T09:22:25Z | |
| dc.description | Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers cantilevers are presented. Half-loop cantilevers based on Lorentz-force deflection convert magnetic flux in changes, thanks to piezoresistive transducers mounted in Wheatstone bridge. Magnetic field in the order of 10 Gauss was measured with a sensitivity of 0.015 mV/Gauss. A Finite Element Model of the device has been developed with Ansys for static and dynamic simulations. Novel out-of-plane ferromagnetic nickel plate magnetometer is also presented. | |
| dc.description | Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing) | |
| dc.identifier | https://arxiv.org/abs/0802.3077 | |
| dc.identifier | http://arxiv.org/abs/0802.3077 | |
| dc.identifier | Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007) | |
| dc.identifier.uri | http://salesiana.dossiersoluciones.com/handle/123456789/155365 | |
| dc.subject | Other Computer Science | |
| dc.title | Out-of-Plane Cmos Compatible Magnetometers | |
| dc.type | text |