A Novel X-Axis Tuning Fork Gyroscope with "8 Vertical Springs-Proofmass" Structure on (111)-Silicon

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dc.creatorDuan, Fei
dc.creatorJiao, Jiwei
dc.creatorWang, Yucai
dc.creatorZhang, Ying
dc.creatorMi, Binwei
dc.creatorLi, Jinpeng
dc.creatorZhu, Jian
dc.creatorWang, Yuelin
dc.date2008-02-21
dc.date.accessioned2026-07-07T09:22:17Z
dc.date.available2026-07-07T09:22:17Z
dc.descriptionA novel x-axis tuning fork MEMS gyroscope with "8 vertical springs-proofmass" structure for Coriolis effect detection is presented. Compared with the common single-plane springs, the 8 vertical springs, symmetrically located at the top and bottom sides, more stably suspend the large thick proofmass featuring large capacitance variation and low mechanical noise. A bulk-micromachining technology is applied to obtain the large proofmass and twins-like dual beams. During the fabrication process, the dimensions of the 8 vertical springs are precisely confined by thermal oxide protected limit trenches (LTs) sidewalls and the extreme slowly etched (111)-planes; therefore a small mismatch of less than 30 Hz is achieved before tuning. Initial test shows a sensitivity of 0.15mV/(deg/s) and rate resolution around 0.1deg/s under atmosphere pressure.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
dc.identifierhttps://arxiv.org/abs/0802.3038
dc.identifierhttp://arxiv.org/abs/0802.3038
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/155327
dc.subjectOther Computer Science
dc.titleA Novel X-Axis Tuning Fork Gyroscope with "8 Vertical Springs-Proofmass" Structure on (111)-Silicon
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