Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System

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dc.creatorTouati, Salim
dc.creatorLorphelin, Nicolas
dc.creatorKanciurzewski, Alexandre
dc.creatorRobin, Renaud
dc.creatorRollier, A. -S.
dc.creatorMillet, Olivier
dc.creatorSegueni, Karim
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:46Z
dc.date.available2026-07-07T12:18:46Z
dc.descriptionThis paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding anti-stiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF measurements are presented and preliminary experimental protocol and results of anti-stiction validation is detailed. Resulting RF performances are -30dB of isolation and -0.45dB of insertion loss at 10 GHz.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0932
dc.identifierhttp://arxiv.org/abs/0805.0932
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212526
dc.subjectOther Computer Science
dc.titleLow Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System
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