Low-Drift Flow Sensor with Zero-Offset Thermopile-Based Power Feedback

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dc.creatorDijkstra, M.
dc.creatorLammerink, T. S. J.
dc.creatorDe Boer, Meint
dc.creatorBerenschot, J. W.
dc.creatorWiegerink, Remco
dc.creatorElwenspoek, M.
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:41Z
dc.date.available2026-07-07T12:18:41Z
dc.descriptionA thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si++ thermopile in combination with up- and downstream Al heater resistors. The inherently zero offset of the thermopile is exploited in a feedback loop controlling the dissipated power in the heater resistors, eliminating inevitable influences of resistance drift and mismatch of the thin-film metal resistors. The control system cancels the flow-induced temperature difference across the thermopile by controlling a power difference between both heater resistors, thereby giving a measure for the flow rate. The flow sensor was characterised for power difference versus water flow rates up to 1.5 ul/min, being in good agreement with a thermal model of the sensor, and the correct low-drift operation of the temperature-balancing control system has been verified.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0891
dc.identifierhttp://arxiv.org/abs/0805.0891
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212493
dc.subjectOther Computer Science
dc.titleLow-Drift Flow Sensor with Zero-Offset Thermopile-Based Power Feedback
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