Impact of Thermal Behavior on Offset in a High-Q Gyroscope

dc.creatorDuan, Fei
dc.creatorJiao, J.
dc.creatorWang, Y.
dc.date2007-11-21
dc.date.accessioned2026-07-07T08:45:40Z
dc.date.available2026-07-07T08:45:40Z
dc.descriptionIn this paper, CFD approach is used to simulate the thermal behavior in a sensitive high-Q gyroscope. The electromagnetically driving wires, in which AC current flows, are treated as Joule heat sources in the model. We found that the differences of temperature, pressure and velocity along the driving direction and transversely across the proof masses increased as the gap height between the proof mass and top glass became smaller. Local pressure gradient is expected to possibly enhance the impact of any imperfect led by MEMS processes or designs on the offset of our tuning fork type gyroscope, which has been experimentally verified. A device with 200um gap gives a two-third offset down compared with that of its counterpart with 50um gap.
dc.descriptionSubmitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
dc.identifierhttps://arxiv.org/abs/0711.3315
dc.identifierhttp://arxiv.org/abs/0711.3315
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/143034
dc.subjectOther Computer Science
dc.titleImpact of Thermal Behavior on Offset in a High-Q Gyroscope
dc.typetext

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