Mechanical Fatigue on Gold MEMS Devices: Experimental Results
| dc.creator | De Pasquale, Giorgio | |
| dc.creator | Somà, Aurelio | |
| dc.creator | Ballestra, Alberto | |
| dc.date | 2008-05-07 | |
| dc.date.accessioned | 2026-07-07T12:18:48Z | |
| dc.date.available | 2026-07-07T12:18:48Z | |
| dc.description | The effect of mechanical fatigue on structural performances of gold devices is investigated. The pull-in voltage of special testing micro-systems is monitored during the cyclical load application. The mechanical collapse is identified as a dramatic loss of mechanical strength of the specimen. The fatigue limit is estimated through the stair-case method by means of the pull-in voltage measurements. Measurements are performed by means of the optical interferometric technique. | |
| dc.description | Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838) | |
| dc.identifier | https://arxiv.org/abs/0805.0945 | |
| dc.identifier | http://arxiv.org/abs/0805.0945 | |
| dc.identifier | Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008) | |
| dc.identifier.uri | http://salesiana.dossiersoluciones.com/handle/123456789/212537 | |
| dc.subject | Other Computer Science | |
| dc.title | Mechanical Fatigue on Gold MEMS Devices: Experimental Results | |
| dc.type | text |