Design and Fabrication of a Novel Micro Electromagnetic Actuator

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dc.creatorLee, C. -Y.
dc.creatorChen, Zgen-Hui
dc.creatorChang, Hsien-Tseng
dc.creatorCheng, Chiang-Ho
dc.creatorWen, Chih-Yung
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:47Z
dc.date.available2026-07-07T12:18:47Z
dc.descriptionThe present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0935
dc.identifierhttp://arxiv.org/abs/0805.0935
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212529
dc.subjectOther Computer Science
dc.titleDesign and Fabrication of a Novel Micro Electromagnetic Actuator
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