A user-friendly approach to local anodic oxidation

dc.creatorPingue, Pasqualantonio
dc.creatorBaschieri, Paolo
dc.creatorAscoli, Cesare
dc.creatorDayez, Michel
dc.date2004-09-23
dc.date.accessioned2026-07-07T03:00:58Z
dc.date.available2026-07-07T03:00:58Z
dc.descriptionA home made DSP-controlled scanning probe microscope (SPM) system has been developed and its utilization as a tool for lithography on nanometer scale is reported. User-friendly graphic interface allows to directly perform nanolithography importing a bitmap pattern on previously-imaged sample region, otherwise moving in real time the probe using an ordinary mouse, acting as a pantograph from macroscopic down to nanometer scale, taking advantage from an absolute-positioning stage. Any measured property of the sample can be used by the lithographic interface to realize interactive patterning of the sample. Moreover, the 'contour-mode' permits to move tip at a fixed relative tip-sample distance, exploiting at each step the previously-acquired topographic signal. The instrument has been successfully employed in order to perform local anodic oxidation (LAO) lithography on semiconducting substrates.
dc.description8 pages, 6 figures, submitted to Advanced Materials
dc.identifierhttps://arxiv.org/abs/cond-mat/0409608
dc.identifierhttp://arxiv.org/abs/cond-mat/0409608
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/24926
dc.subjectMaterials Science
dc.titleA user-friendly approach to local anodic oxidation
dc.typetext

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