A user-friendly approach to local anodic oxidation
| dc.creator | Pingue, Pasqualantonio | |
| dc.creator | Baschieri, Paolo | |
| dc.creator | Ascoli, Cesare | |
| dc.creator | Dayez, Michel | |
| dc.date | 2004-09-23 | |
| dc.date.accessioned | 2026-07-07T03:00:58Z | |
| dc.date.available | 2026-07-07T03:00:58Z | |
| dc.description | A home made DSP-controlled scanning probe microscope (SPM) system has been developed and its utilization as a tool for lithography on nanometer scale is reported. User-friendly graphic interface allows to directly perform nanolithography importing a bitmap pattern on previously-imaged sample region, otherwise moving in real time the probe using an ordinary mouse, acting as a pantograph from macroscopic down to nanometer scale, taking advantage from an absolute-positioning stage. Any measured property of the sample can be used by the lithographic interface to realize interactive patterning of the sample. Moreover, the 'contour-mode' permits to move tip at a fixed relative tip-sample distance, exploiting at each step the previously-acquired topographic signal. The instrument has been successfully employed in order to perform local anodic oxidation (LAO) lithography on semiconducting substrates. | |
| dc.description | 8 pages, 6 figures, submitted to Advanced Materials | |
| dc.identifier | https://arxiv.org/abs/cond-mat/0409608 | |
| dc.identifier | http://arxiv.org/abs/cond-mat/0409608 | |
| dc.identifier.uri | http://salesiana.dossiersoluciones.com/handle/123456789/24926 | |
| dc.subject | Materials Science | |
| dc.title | A user-friendly approach to local anodic oxidation | |
| dc.type | text |