Design, Fabrication and Characterization of a Piezoelectric Microgenerator Including a Power Management Circuit

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dc.creatorMarzencki, M.
dc.creatorAmmar, Y.
dc.creatorBasrour, S.
dc.date2008-02-21
dc.date.accessioned2026-07-07T09:22:18Z
dc.date.available2026-07-07T09:22:18Z
dc.descriptionWe report in this paper the design, fabrication and experimental characterization of a piezoelectric MEMS microgenerator. This device scavenges the energy of ambient mechanical vibrations characterized by frequencies in the range of 1 kHz. This component is made with Aluminum Nitride thin film deposited with a CMOS compatible process. Moreover we analyze two possible solutions for the signal rectification: a discrete doubler-rectifier and a full custom power management circuit. The ASIC developed for this application takes advantage of diodes with very low threshold voltage and therefore allows the conversion of extremely low input voltages corresponding to very weak input accelerations. The volume of the proposed generator is inferior to 1mm3 and the generated powers are in the range of 1$μ$W. This system is intended to supply power to autonomous wireless sensor nodes.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
dc.identifierhttps://arxiv.org/abs/0802.3044
dc.identifierhttp://arxiv.org/abs/0802.3044
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/155332
dc.subjectOther Computer Science
dc.titleDesign, Fabrication and Characterization of a Piezoelectric Microgenerator Including a Power Management Circuit
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