Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture

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dc.creatorSeguineau, C.
dc.creatorIgnat, M.
dc.creatorMalhaire, C.
dc.creatorBrida, S.
dc.creatorLafontan, X.
dc.creatorDesmarres, J. -M.
dc.creatorJosserond, C.
dc.creatorDebove, L.
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:48Z
dc.date.available2026-07-07T12:18:48Z
dc.descriptionThis study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on "low cost" specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0942
dc.identifierhttp://arxiv.org/abs/0805.0942
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212535
dc.subjectOther Computer Science
dc.titleMicro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture
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