On the Casimir effect in the microelectromechanical systems MEMS

Loading...
Thumbnail Image

Date

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

In this paper the thermal transport phenomena in MEMS are investigated. The thermal Klein-Gordon transport equation for nanoscale structures is formulated and solved. Key words: MEMS, Klein-Gordon equation, Casimir effect.
10 pages, 7 figures

Citation

Collections