Measurement of Large Forces and Deflections in Microstructures

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dc.creatorHals, Kai Axel
dc.creatorHalvorsen, Einar
dc.creatorChen, Xuyuan
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:37Z
dc.date.available2026-07-07T12:18:37Z
dc.descriptionProperties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural factors. A measurement system has been made to measure force/deflection on microstructures to examine some of the structural properties. This is a stylus setup integrated with a load cell and a linear actuator. First, the requirements for the measurement system were established. Then the system was built up and characterized. We have successfully made measurements on a typical micromechanical structure, a cantilever accelerometer design. The stylus placement accuracy, the spring constant along the proof mass, analysis of the force/deflection curve shape and destructive tests on the cantilever have been investigated in our experiment and will be presented in this paper.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0864
dc.identifierhttp://arxiv.org/abs/0805.0864
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212471
dc.subjectOther Computer Science
dc.titleMeasurement of Large Forces and Deflections in Microstructures
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