Micro-Hotplates for Thermal Characterisation of Structural Materials of Mems

Simple item page
dc.creatorFurjes, P.
dc.creatorCsikvari, P.
dc.creatorBársony, I.
dc.creatorDucso, Cs.
dc.date2008-01-07
dc.date.accessioned2026-07-07T08:52:46Z
dc.date.available2026-07-07T08:52:46Z
dc.descriptionAccurate knowledge of mechanical and thermal properties of structural materials used in MEMS is essential for optimum geometric and functional design. The extraction of precise physical properties is rather complicated due to the size effects, the complexity of the structures and the variations of formation processes. This work is intended to determine the thermal properties of silicon-nitride and diamond layers applied in thermal sensor structures by analyzing thermal responses of a multilayer micro-heater structure.
dc.descriptionSubmitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
dc.identifierhttps://arxiv.org/abs/0801.0750
dc.identifierhttp://arxiv.org/abs/0801.0750
dc.identifierDans 13th International Worshop on THERMal INvestigations of ICs and Systems - THERMINIC 2007, Budapest : Hongrie (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/145389
dc.subjectGeneral Physics
dc.titleMicro-Hotplates for Thermal Characterisation of Structural Materials of Mems
dc.typetext

Files

Collections

arXiv