Miniaturized Fluorescence Excitation Platform with Optical Fiber for Bio-Detection Chips

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dc.creatorYang, Hsiharng
dc.creatorLee, Chung-Tze
dc.date2007-11-21
dc.date.accessioned2026-07-07T08:45:42Z
dc.date.available2026-07-07T08:45:42Z
dc.descriptionThis paper presents a new research study on the platform fabrication of fluorescence bio-detection chip with an optical fiber transmission. Anisotropic wet etching on (100) silicon wafers to fabrication V-groove for optical fiber alignment and micro-mirror were included. Combing with anodic bonding technique to adhere glass, silicon structure and optical fiber for a fluorescence excitation platform was completed. In this study, the etching solution 40% KOH was used to study the parameters effect. The results show that working temperature is the main parameter to significantly effect the etch rate. The anisotropic etching resulted 54.7 degrees reflective mirrors and its reflectivity for optical beam were also examined. The surface roughness of the micro-mirror is Ra 4.1 nm measured using AFM, it provides excellent optical reflection. The incident light and beam profiles were also examined for further study. This study can show this micro-platform adaptable for fluorescence bio-detection.
dc.descriptionSubmitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
dc.identifierhttps://arxiv.org/abs/0711.3325
dc.identifierhttp://arxiv.org/abs/0711.3325
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/143043
dc.subjectOther Computer Science
dc.titleMiniaturized Fluorescence Excitation Platform with Optical Fiber for Bio-Detection Chips
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