RF-MEMS beam components : FEM modelling and experimental identification of pull-in in presence of residual stress

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dc.creatorBallestra, Alberto
dc.creatorBrusa, Eugenio
dc.creatorDe Pasquale, Giorgio
dc.creatorMunteanu, Mircea Gh.
dc.creatorSomà, Aurelio
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:41Z
dc.date.available2026-07-07T12:18:41Z
dc.descriptionIn this paper an experimental validation of numerical approaches aimed to predict the coupled behaviour of microbeams for out-of-plane bending tests is performed. This work completes a previous investigation concerning in plane microbeams bending. Often out-of-plane microcantilevers and clamped-clamped microbeams suffer the presence of residual strain and stress, which affect the value of pull-in voltage. In case of microcantilever an accurate modelling includes the effect of the initial curvature due to microfabrication. In double clamped microbeams a preloading applied by tensile stress is considered. Geometrical onlinearity caused by mechanical coupling between axial and flexural behaviour is detected and modelled. Experimental results demonstrate a good agreement between FEM approaches proposed and tests. A fairly fast and accurate prediction of pull-in condition is performed, thus numerical models can be used to identify residual stress in microbridges by reverse analysis from the measured value of pull-in voltage.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0895
dc.identifierhttp://arxiv.org/abs/0805.0895
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212496
dc.subjectOther Computer Science
dc.titleRF-MEMS beam components : FEM modelling and experimental identification of pull-in in presence of residual stress
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