A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications

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dc.creatorRobin, Renaud
dc.creatorTouati, Salim
dc.creatorSegueni, Karim
dc.creatorMillet, Olivier
dc.creatorBuchaillot, Lionel
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:47Z
dc.date.available2026-07-07T12:18:47Z
dc.descriptionThis paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4$μ$m) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0934
dc.identifierhttp://arxiv.org/abs/0805.0934
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212528
dc.subjectOther Computer Science
dc.titleA New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications
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