Micro-Ball Lens Array Fabrication in Photoresist Using Ptfe Hydrophobic Effect
| dc.creator | Shyu, Ruey-Fang | |
| dc.creator | Yang, Hsiharng | |
| dc.creator | Tsai, Wen-Ren | |
| dc.creator | Tsai, Jhy-Cherng | |
| dc.date | 2007-11-21 | |
| dc.date.accessioned | 2026-07-07T08:45:42Z | |
| dc.date.available | 2026-07-07T08:45:42Z | |
| dc.description | This paper presents a simple method to fabricate micro-ball lens and its array. The key technology is to use the hydrophobic characteristics of polyterafluoroethylene (PTFE) substrate. High contact angle between melted photoresist pattern and PTFE can generate micro-ball lens and its array. PTFE thin film was spun onto a silicon wafer and dried in oven. Photoresist AZ4620 was used to pattern micro-columns with different diameters 60, 70 and 80 $μ$m. A thermal reflow process then was applied to melt these micro-column patterns resulted in micro-ball lens array. The achieved micro-ball lens array with diameter 98 $μ$m was fabricated using 80 $μ$m in diameter patterns. This method provides a simple fabrication process and low material cost. | |
| dc.description | Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions) | |
| dc.identifier | https://arxiv.org/abs/0711.3329 | |
| dc.identifier | http://arxiv.org/abs/0711.3329 | |
| dc.identifier | Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006) | |
| dc.identifier.uri | http://salesiana.dossiersoluciones.com/handle/123456789/143046 | |
| dc.subject | Other Computer Science | |
| dc.title | Micro-Ball Lens Array Fabrication in Photoresist Using Ptfe Hydrophobic Effect | |
| dc.type | text |