Porous Alumina Based Capacitive MEMS RH Sensor

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dc.creatorJuhasz, L.
dc.creatorVass-Varnai, A.
dc.creatorTimar-Horvath, Veronika
dc.creatorDesmulliez, Marc
dc.creatorDhariwal, Resh
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:36Z
dc.date.available2026-07-07T12:18:36Z
dc.descriptionThe aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity (RH) sensor that can be incorporated into a state-of-the-art, wireless sensor network. In this paper we discuss the preparation of our new capacitive structure based on post-CMOS MEMS processes and the methods which were used to characterize the thin film porous alumina sensing layer. The average sensitivity is approx. 15 pF/RH% which is more than a magnitude higher than the values found in the literature. The sensor is equipped with integrated resistive heating, which can be used for maintenance to reduce drift, or for keeping the sensing layer at elevated temperature, as an alternative method for temperature-dependence cancellation.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0857
dc.identifierhttp://arxiv.org/abs/0805.0857
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212464
dc.subjectOther Computer Science
dc.titlePorous Alumina Based Capacitive MEMS RH Sensor
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