Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems
| dc.creator | Soma, A. | |
| dc.creator | De Pasquale, G. | |
| dc.date | 2008-02-21 | |
| dc.date.accessioned | 2026-07-07T09:22:24Z | |
| dc.date.available | 2026-07-07T09:22:24Z | |
| dc.description | In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effects of damping and stiffness transferred from the surrounding ambient air to oscillating structures ; the effect of hole's cross section and plate's extension is observed. Results obtained by F.E.M. models are compared with experimental measurements performed by an optical interferometric microscope. | |
| dc.description | Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing) | |
| dc.identifier | https://arxiv.org/abs/0802.3076 | |
| dc.identifier | http://arxiv.org/abs/0802.3076 | |
| dc.identifier | Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007) | |
| dc.identifier.uri | http://salesiana.dossiersoluciones.com/handle/123456789/155364 | |
| dc.subject | Other Computer Science | |
| dc.title | Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems | |
| dc.type | text |