Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems

dc.creatorSoma, A.
dc.creatorDe Pasquale, G.
dc.date2008-02-21
dc.date.accessioned2026-07-07T09:22:24Z
dc.date.available2026-07-07T09:22:24Z
dc.descriptionIn this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effects of damping and stiffness transferred from the surrounding ambient air to oscillating structures ; the effect of hole's cross section and plate's extension is observed. Results obtained by F.E.M. models are compared with experimental measurements performed by an optical interferometric microscope.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
dc.identifierhttps://arxiv.org/abs/0802.3076
dc.identifierhttp://arxiv.org/abs/0802.3076
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/155364
dc.subjectOther Computer Science
dc.titleIdentification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems
dc.typetext

Files

Collections