Fabrication of micro-mirrors with pyramidal shape using anisotropic etching of silicon

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dc.creatorMoktadir, Z.
dc.creatorGollasch, C.
dc.creatorKoukharenko, E.
dc.creatorKraft, M.
dc.creatorPrakash, G. Vijaya
dc.creatorBaumberg, J. J.
dc.creatorTrupke, M.
dc.creatorEriksson, S.
dc.creatorHinds, E. A.
dc.date2004-09-02
dc.date.accessioned2026-07-07T05:52:36Z
dc.date.available2026-07-07T05:52:36Z
dc.descriptionGold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS systems.
dc.description3 pages, 4 figures. Fig. 4 may not print correctly on some printers due to image compression
dc.identifierhttps://arxiv.org/abs/physics/0409021
dc.identifierhttp://arxiv.org/abs/physics/0409021
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/86373
dc.subjectOptics
dc.titleFabrication of micro-mirrors with pyramidal shape using anisotropic etching of silicon
dc.typetext

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