Modeling of a piezoelectric micro-scanner

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dc.creatorChaehoi, A.
dc.creatorBegbie, M.
dc.creatorCornez, D.
dc.creatorKirk, K.
dc.date2008-02-21
dc.date.accessioned2026-07-07T09:22:27Z
dc.date.available2026-07-07T09:22:27Z
dc.descriptionMicro-scanners have been widely used in many optical applications. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. This paper presents a complete analytical model of the piezoelectric micro-scanner. This theoretical model based on strength of material equations calculates the force generated by the multimorphs on the mirror, the profile of the structure and the angular deflection of the mirror. The proposed model, used to optimize the design of the piezoelectric silicon micro-scanner, is intended for further HDL integration, allowing in this way system level simulation and optimization.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
dc.identifierhttps://arxiv.org/abs/0802.3090
dc.identifierhttp://arxiv.org/abs/0802.3090
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/155377
dc.subjectOther Computer Science
dc.titleModeling of a piezoelectric micro-scanner
dc.typetext

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