Joule Expansion Imaging Techniques on Microlectronic Devices

Simple item page
dc.creatorGrauby, S.
dc.creatorLopez, L. -D. Patino
dc.creatorSalhi, A.
dc.creatorPuyoo, E.
dc.creatorRampnoux, J. -M.
dc.creatorClaeys, W.
dc.creatorDilhaire, S.
dc.date2008-01-07
dc.date.accessioned2026-07-07T08:53:01Z
dc.date.available2026-07-07T08:53:01Z
dc.descriptionWe have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using Scanning Thermal Microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements, which should improve the spatial resolution.
dc.descriptionSubmitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
dc.identifierhttps://arxiv.org/abs/0801.1041
dc.identifierhttp://arxiv.org/abs/0801.1041
dc.identifierDans 13th International Worshop on THERMal INvestigations of ICs and Systems - THERMINIC 2007, Budapest : Hongrie (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/145478
dc.subjectGeneral Physics
dc.titleJoule Expansion Imaging Techniques on Microlectronic Devices
dc.typetext

Files

Collections

arXiv