Study of First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers

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dc.creatorNouet, Pascal
dc.creatorMailly, Frédérick
dc.creatorLatorre, Laurent
dc.creatorNouet, Pascal
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:45Z
dc.date.available2026-07-07T12:18:45Z
dc.descriptionThis paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is built. This "electro-physical" modulator realizes an analog-to-digital conversion of the signal. Besides the feedback scheme should improve the sensor performance.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0920
dc.identifierhttp://arxiv.org/abs/0805.0920
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212518
dc.subjectOther Computer Science
dc.titleStudy of First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers
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