Influence of Micro-Cantilever Geometry and Gap on Pull-in Voltage

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dc.creatorFaris, W.
dc.creatorMohammed, H.
dc.creatorAbdalla, M. M.
dc.creatorLing, C. -H.
dc.date2007-11-21
dc.date.accessioned2026-07-07T08:45:38Z
dc.date.available2026-07-07T08:45:38Z
dc.descriptionIn this paper, we study the behaviour of a microcantilever beam under electrostatic actuation using finite difference method. This problem has a lot of applications in MEMS based devices like accelerometers, switches and others. In this paper, we formulated the problem of a cantilever beam with proof mass at its end and carried out the finite difference solution. we studied the effects of length, width, and the gap size on the pull-in voltage using data that are available in the literature. Also, the stability limit is compared with the single degree of freedom commonly used in the earlier literature as an approximation to calculate the pull-in voltage.
dc.descriptionSubmitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
dc.identifierhttps://arxiv.org/abs/0711.3299
dc.identifierhttp://arxiv.org/abs/0711.3299
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/143021
dc.subjectOther Computer Science
dc.titleInfluence of Micro-Cantilever Geometry and Gap on Pull-in Voltage
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