High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection

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dc.creatorLu, Jian
dc.creatorIkehara, T.
dc.creatorZhang, Yi
dc.creatorMihara, Takashi
dc.creatorItoh, Toshihiro
dc.creatorMaeda, Ryutaro
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:46Z
dc.date.available2026-07-07T12:18:46Z
dc.descriptionA high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra-sensitive mass detection. Energy dissipation from intrinsic mechanical loss of the PZT film was successfully compressed by separating the PZT actuator from resonant structure. Excellent Q-factor, which is several times larger than conventional PZT cantilever, was achieved under both atmospheric pressure and reduced pressures. For a 30 micrometer-wide 100 micrometer-long cantilever, Q-factor was measured as high as 1113 and 7279 under the pressure of 101.2 KPa and 35 Pa, respectively. Moreover, it was found that high-mode vibration can be realized by the cantilever for the pursuit of great Q-factor, while support loss became significant because of the increased vibration amplitude at the actuation point. An optimized structure using node-point actuation was suggested then to suppress corresponding energy dissipation.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0933
dc.identifierhttp://arxiv.org/abs/0805.0933
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212527
dc.subjectOther Computer Science
dc.titleHigh Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection
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