Design and Fabrication of a Micro Electrostatic Vibration-to-Electricity Energy Converter

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dc.creatorChiu, Yi
dc.creatorKuo, Chiung-Ting
dc.creatorChu, Yu-Shan
dc.date2007-11-21
dc.date.accessioned2026-07-07T08:45:40Z
dc.date.available2026-07-07T08:45:40Z
dc.descriptionThis paper presents a micro electrostatic vibration-toelectricity energy converter. For the 3.3 V supply voltage and 1cm2 chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In the current design, the output power is 200 $μ$W/cm2 for the optimal load of 8 MΩ. The device was fabricated in a silicon-on-insulator (SOI) wafer. Mechanical and electrical measurements were conducted. Residual particles caused shortage of the variable capacitor and the output power could not be measured. Device design and fabrication processes are being refined.
dc.descriptionSubmitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
dc.identifierhttps://arxiv.org/abs/0711.3313
dc.identifierhttp://arxiv.org/abs/0711.3313
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/143032
dc.subjectOther Computer Science
dc.titleDesign and Fabrication of a Micro Electrostatic Vibration-to-Electricity Energy Converter
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