2026-07-072026-07-07http://salesiana.dossiersoluciones.com/handle/123456789/143047Reduced-Order Modelling of the Bending of an Array of An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupled-field FEM simulation.Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)Other Computer Sciencetext