2026-07-072026-07-07http://salesiana.dossiersoluciones.com/handle/123456789/22318We present a numerical method to model electric field sensitive scanning probe microscopy measurements which allows for a tip of arbtrary shape and invokes image charges to exactly account for a sample dielectric overlayer. The method is applied to calculate the spatial resolution of a subsurface charge accumulation imaging system, achieving reasonable agreement with experiment.5 pages, 3 figuresMesoscale and Nanoscale PhysicsMaterials Sciencetext