2026-07-072026-07-07http://salesiana.dossiersoluciones.com/handle/123456789/137863This paper presents the consideration of the presence and the influence of non-linear distortion of photo-acoustic measurement set-up on the results of thermal properties analysis for the multi-layer semiconductor structure. The authors propose a method which will eliminate such an influence.Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)Materials Sciencetext