2026-07-072026-07-07http://salesiana.dossiersoluciones.com/handle/123456789/28934Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS) in a reflection mode are compared as the methods for phase composition investigation of thin film oxide systems by ion profiling. As an example, the Al/Al2O3/Si and YBa2Cu3O7/CeO2/Al2O3 systems are considered. The adaptation of applied statistics methods for AES and EELS data treatment is discussed.8 pages LaTex, 16 figures PostScriptMaterials Sciencetext