2026-07-072026-07-07http://salesiana.dossiersoluciones.com/handle/123456789/26487In this paper the thermal transport phenomena in MEMS are investigated. The thermal Klein-Gordon transport equation for nanoscale structures is formulated and solved. Key words: MEMS, Klein-Gordon equation, Casimir effect.10 pages, 7 figuresOther Condensed Mattertext