2026-07-072026-07-07http://salesiana.dossiersoluciones.com/handle/123456789/160320In this paper is considered a matter of the system for wafer defect inspection (WDIS) practical realization. Such systems are on the agenda as the next generation and substitution for light optics and single $e$-beam based WDISs.16 pages, 18 figuresOpticsInstrumentation and Detectorstext