2026-07-072026-07-07http://salesiana.dossiersoluciones.com/handle/123456789/212528This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4$μ$m) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated.Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)Other Computer Sciencetext