Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device
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Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)